Xuelin Dong

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The coherent gradient sensing (CGS) method, one kind of shear interferometry sensitive to surface slope, has been applied to full-field curvature measuring for decades. However, its accuracy, sensitivity, and resolution have not been studied clearly. In this paper, we analyze the accuracy, sensitivity, and resolution for the CGS method based on the(More)
Multiwavelength shearing interferometry, a full-field, real-time, and vibration-insensitive method with enhanced accuracy, is proposed. Theoretically, the more wavelengths that are used for shearing interferometers, the higher the precision that can be achieved in the measurement of slopes, curvatures, and the shapes of reflective surfaces. A spherical(More)
Coherent gradient sensing (CGS), a shear interferometry method, is developed to measure the full-field curvatures of a film/substrate system at high temperature. We obtain the relationship between an interferogram phase and specimen topography, accounting for temperature effect. The self-interference of CGS combined with designed setup can reduce the air(More)
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