Xu-Qian Zheng

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We report on the first experimental demonstration of vibrating two-dimensional nanoelectromechanical systems (2D NEMS) with on-chip piezoelectric excitation. Combining a wafer-scale aluminum nitride(More)
We report on characterization of microsale lead zirconate titanate (PZT) thin film cantilevers, by both optical and electrical measurements, for up to the 7th resonance mode in 2kHz to 2MHz frequency(More)
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