- Publications
- Influence
Claim Your Author Page
Ensure your research is discoverable on Semantic Scholar. Claiming your author page allows you to personalize the information displayed and manage publications.
- Xiuhong Wei, Arthur Johannes Hubertus Wachters, H. Paul Urbach
- Journal of the Optical Society of America. A…
- 2007
We present a three-dimensional model based on the finite-element method for solving the time-harmonic Maxwell equation in optics. It applies to isotropic or anisotropic dielectrics and metals and to… (More)
- Xiuhong Wei, H. P. Urbach, Arthur Johannes Hubertus Wachters, Yuri Aksenov
- SPIE Advanced Lithography
- 2004
The polarization induced by the mask is studied by using a 3D rigorous model, which solves Maxwell equations using the finite element method. The aerial image depends strongly on the change of… (More)
The polarization induced by the mask is studied by using a 3D rigorous model, wich solves Maxwell equations using the finite element method. Teh aerial image depends strongly on the change of… (More)
- Yuri Aksenov, Peter Dirksen, Xiuhong Wei, Peter Zandbergen
- SPIE Advanced Lithography
- 2004
Through ArF immersion lithography a road towards increased optical resolution at the 193nm wavelength has been opened. According to recently proposed roadmaps, ArF immersion lithography will be used… (More)
In many branches of optics such as optical recording and near field optics the interaction of light occurs with structures of the size of the order of the wavelength. In optical recording, metals… (More)