Xingtao Xue

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A method to improve pattern critical dimension (CD) and reduce the metal residue level during gold (Au) and chrome (Cr) wet etch processes in MEMS devices is investigated. Instead of traditional single-step wet etch process, a multi-step wet etch method is used to etch Au with the etchant formulated by potassium iodide, iodine and deionized water(More)
The transesterification of α-d-glucose with divinylsuccinate, divinyladipate and divinylsebacate in pyridine at 55 °C for 3 days was catalyzed by an alkaline protease from Bacillus subtilis to give corresponding 6-O-vinyl glucose esters at 30%, 53% and 35% yield, respectively. The stereo-selectivity of the alkaline protease toward the α-anomer was affected(More)
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