Woo-Hyeong Lee

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To improve the performance and reliability of deep submicron MOS devices, a gate-recessed MOSFET (GR-MOSFET), which has a selectively halo-doped recessed channel and a deep graded source/drain formed without counterdoping, is proposed. The GR-MOS structure, which adopts a new doping concept, eliminates the tradeoff between drain-induced barrier lowering(More)
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