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  • Yeong-Hyeon Seo, Sung-Pyo Yang, Hyunwoo Kim, Won-Kyung Lee, Kyungmin Hwang, Ki-Hun Jeong
  • Materials Science
  • IEEE 32nd International Conference on Micro…
  • 2019
  • We report a high resolution 3D imaging using variable structured illumination via Lissajous scanning MEMS mirror module. The Lissajous scanning MEMS mirror was operated at pseudo-resonant frequenciesContinue Reading