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Piezoelectric Actuators (PEAs) are the key components in nano-positioning. However, the inherent hysteresis nonlinearity of PEAs is seriously affected the control precision. In this paper, an active disturbance rejection controller is proposed to deal with the tracking control of PEAs. First, the hysteresis nonlinearity is reformulated as a disturbance of(More)
The piezoelectric-actuated stick-slip micro-positioning devices (PASSMDs) have been drawing considerable attention for micro-positioning applications due to their theoretically unlimited motion and good positioning precision. However, the inherent hysteresis of the piezoelectric actuators (PEAs) seriously deteriorates the positioning accuracy of the(More)
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