Wang Xingjun

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This paper presents the structure design of a dual-mass decoupled tuning fork micro-gyroscope(DDTFG). Two proof masses of the DDTFG are linked elastically not only in the drive mode but also in the sense mode and can be resonant driven simultaneously in in-phase and inverted-phase mode even if there is fabrication error. The mode distribution of the DDTFG(More)
The quadrature error analysis, structure design and simulation of a symmetric decoupled silicon micro-gyroscope with high decoupling performance are present in the paper. The improvements of straight beam, the anchor and the balance beam greatly restrained the mechanical error. In the drive mode, the maximum displacement of the sense framework along the(More)
This paper presents the structure design, working principles and heat transformation of the on-chip temperature-control for dual-mass micro-gyroscope. The dedicated temperature sensor and heater provide real-time monitored and controlled working environment for the micro-gyroscope, thermal stabilization is thus achieved by maintaining the gyroscope(More)
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