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Imbalanced Mach-Zehnder interferometer integrated in micromachined silicon substrate for pressure sensor
This paper describes an interferometric pressure sensor designed to work as a remote sensor in a coherence modulation scheme, allowing a linear phase read-out of the signal. The sensor is realizedExpand
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Simulations of surface acoustic wave devices built on stratified media using a mixed finite element/boundary integral formulation
The demand for high frequency surface acoustic wave devices for modern telecommunication applications imposes the development of devices able to answer the manufacturer requirements. The use of highExpand
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  • Open Access
Miniaturized pH biosensors based on electrochemically modified electrodes with biocompatible polymers.
Potentiometric pH sensors based on linear polyethylenimine (L-PEI) and linear polypropylenimine(L-PPI), two synthetic enzymes and biocompatible polymers, films were prepared by electropolymerizationExpand
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Fabrication of SAW resonators on Quartz and Langasite using Nano-Imprint Lithography
The development of new technological approaches such as Nano-Imprint Lithography (NIL) is expected to open new perspectives in the cost-effective high resolution fabrication of SAW devices.Expand
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A FEA/BEM approach to simulate complex electrode structures devoted to guided elastic wave periodic transducers
A modelling approach able to address complicated SAW periodic structures with non homogeneous geometry has been developed and implemented. It is based on the combination of finite element analysisExpand
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A mixed finite element/boundary element approach to simulate complex guided elastic wave periodic transducers
The development of new surface acoustic wave devices exhibiting complicated electrode patterns or layered excitation transducers has been favored by an intense innovative activity in this area. ForExpand
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  • Open Access
Development of a gas detection micro-device for hydrogen fluoride vapours
This research concentrates on the sensitivity of a tin dioxide-based gas sensor semiconductor with respect to hydrogen fluoride in the atmosphere. This paper is focused on the development of aExpand
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High-frequency surface acoustic wave device based on thin-film piezoelectric interdigital transducers
Using high-quality epitaxial c-axis Pb(Zr0.2Ti0.8)O3 films grown by off-axis magnetron sputtering onto metallic (001) Nb-doped SrTiO3 substrates, a nonconventional thin-film surface acoustic waveExpand
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  • Open Access
Three-dimensional modelling of micromachined-ultrasonic-transducer arrays operating in water.
We report on the 3-D modelling of periodic arrays of capacitive micromachined ultrasonic transducers (cMUTs) operating in fluid. Specific developments have been performed to model biperiodicExpand
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High-frequency surface acoustic waves excited on thin-oriented LiNbO/sub 3/ single-crystal layers transferred onto silicon
The need for high-frequency, wide-band filters has instigated many developments based on combining thin piezoelectric films and high acoustic velocity materials (sapphire, diamond-like carbon,Expand
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  • Open Access