W N Partlo

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A simple model for the scattering of coherent light through diffusers has been applied to a moving diffuser despeckler in order to estimate the scattering angles, speckle decorrelation length, and interaction between multiple diffusers. A Gaussian model for the diffuser thickness variations has been used to derive a relation between the scattering cone of a(More)
In the investigation of the imaging performance of a high-N.A. deep ultraviolet lens for submicrometer lithography, a ghost image was detected that was displaced from the main image. The origin of the ghost was traced to periodic variations in the index of refraction of a fused-silica beam splitter in the optical column. Several different beam splitters(More)
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