Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PMN-PT). We synthesized high-quality… (More)
The Casimir force is the attraction between uncharged metallic surfaces as a result of quantum mechanical vacuum fluctuations of the electromagnetic field. We demonstrate the Casimir effect in microelectromechanical systems using a micromachined torsional device. Attraction between a polysilicon plate and a spherical metallic surface results in a torque… (More)
The Casimir force between uncharged metallic surfaces originates from quantum-mechanical zero-point fluctuations of the electromagnetic field. We demonstrate that this quantum electrodynamical effect has a profound influence on the oscillatory behavior of microstructures when surfaces are in close proximity (< or =100 nm). Frequency shifts, hysteretic… (More)
The Casimir force between bodies in vacuum can be understood as arising from their interaction with an infinite number of fluctuating electromagnetic quantum vacuum modes, resulting in a complex dependence on the shape and material of the interacting objects. Becoming dominant at small separations, the force has a significant role in nanomechanics and… (More)
We demonstrate a fully integrated optomechanical transducer achieving 580 ppm wavelength tuning of a high quality factor (Q=10<sup>5</sup>–10<sup>6</sup>) waveguide-coupled silicon microdisk by electrostatically actuating a dielectric membrane located in the evanescent field region above it.
Plasmonic structures couple oscillating electromagnetic fields to conduction electrons in noble metals and thereby can confine optical-frequency excitations at nanometre scales. This confinement both facilitates miniaturization of nanophotonic devices and makes their response highly sensitive to mechanical motion. Mechanically coupled plasmonic devices thus… (More)
Mechanical linkages are fundamentally important for the transfer of motion through assemblies of parts to perform work. Whereas their behavior in macroscale systems is well understood, there are open questions regarding the performance and reliability of linkages with moving parts in contact within microscale systems. Measurement challenges impede… (More)
Surface-enhanced infrared absorption (SEIRA) spectroscopy exploits the locally enhanced field surrounding plasmonic metamaterials to increase the sensitivity of infrared spectroscopy. The light polarization and incidence angle are important factors for exciting plasmonic nanostructures; however, such angle dependence is often ignored in SEIRA experiments,… (More)
We present integrated optomechanical transducers with exposed tips and demonstrate ultrahigh force sensitivity and large bandwidth. The transducer is implemented as an atomic force microscope probe in the contact mode and nanoscale resolution is demonstrated.
We present on-chip Si<sub>3</sub>N<sub>4</sub> optomechanical transducers that integrate nanomechanical tuning forks with microdisk resonators for displacement measurements. Enhanced mechanical Q relative to single cantilevers and mechanical frequency adjustment by beam stress engineering were realized.