Learn More
Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg(1/3)Nb(2/3))O(3)-PbTiO(3) (PMN-PT). We synthesized high-quality(More)
The Casimir force is the attraction between uncharged metallic surfaces as a result of quantum mechanical vacuum fluctuations of the electromagnetic field. We demonstrate the Casimir effect in microelectromechanical systems using a micromachined torsional device. Attraction between a polysilicon plate and a spherical metallic surface results in a torque(More)
Sensitive transduction of the motion of a microscale cantilever is central to many applications in mass, force, magnetic resonance, and displacement sensing. Reducing cantilever size to nanoscale dimensions can improve the bandwidth and sensitivity of techniques like atomic force microscopy, but current optical transduction methods suffer when the(More)
Recent investigations of microcavity frequency combs based on cascaded four-wave mixing have revealed a link between the evolution of the optical spectrum and the observed temporal coherence. Here we study a silicon nitride microresonator for which the initial four-wave mixing sidebands are spaced by multiple free spectral ranges (FSRs) from the pump.(More)
Microresonator optical frequency combs based on cascaded four-wave mixing are potentially attractive as a multi-wavelength source for on-chip optical communications. In this paper we compare time domain coherence, radio-frequency (RF) intensity noise, and individual line optical communications performance for combs generated from two different silicon(More)
The Casimir force between uncharged metallic surfaces originates from quantum-mechanical zero-point fluctuations of the electromagnetic field. We demonstrate that this quantum electrodynamical effect has a profound influence on the oscillatory behavior of microstructures when surfaces are in close proximity (< or =100 nm). Frequency shifts, hysteretic(More)
We demonstrate optomechanically mediated electromagnetically induced transparency and wavelength conversion in silicon nitride (Si3N4) microdisk resonators. Fabricated devices support whispering gallery optical modes with a quality factor (Q) of 10(6), and radial breathing mechanical modes with a Q=10(4) and a resonance frequency of 625 MHz, so that the(More)
The collective oscillation of conduction electrons, responsible for the localized surface plasmon resonances, enables engineering nanomaterials by tuning their optical response from the visible to terahertz as a function of nanostructure size, shape, and environment. While theoretical calculations helped tremendously in understanding plasmonic nanomaterials(More)
We report on progress in developing compact sensors for atomic force microscopy (AFM), in which the mechanical transducer is integrated with near-field optical readout on a single chip. The motion of a nanoscale, doubly clamped cantilever was transduced by an adjacent high quality factor silicon microdisk cavity. In particular, we show that displacement(More)
Photothermal induced resonance (PTIR) is a new technique which combines the chemical specificity of infrared (IR) spectroscopy with the lateral resolution of atomic force microscopy (AFM). PTIR requires a pulsed tunable laser for sample excitation and an AFM tip to measure the sample expansion induced by light absorption. The limited tunability of commonly(More)