Vahid Mohammadi

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In this paper fabrication of a 0&#x2013;3 ceramic/ceramic composite lead zirconate titanate, Pb(Zr<inf>0.52</inf>Ti<inf>0.48</inf>)O<inf>3</inf> thin film has been presented and then a pressure sensor based on multilayer thin-film PZT diaphragm contain of Lead Zirconate Titanate nanocrystalline powders was designed, modeled and optimized. This multilayer(More)
Multilayer thin-film PZT diaphragm has been designed and modeled. Commercial Finite element software, ANSYS was implemented to model the diaphragm. This multi-layer diaphragm can be used as both sensor and actuator. A simplified model is introduced to reduce the CPU time. Dynamic characteristics of the multilayer diaphragm have been investigated. The(More)
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