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- Publications
- Influence
Experiments on beam--plasma discharges in connection with plasma chemistry
- V. M. Atamanov, A. I. Zhuzhunashvili, +6 authors E. K. Cherkasova
- Chemistry
- 1979
The properties of low-temperature plasmas are finding extensive use for chemical reactions. Efficient plasma-chemistry reactions require a steady-state plasma with a degree of ionization ..cap… Expand
Deposition and Etching of Thin Films by Means of Beam Plasma Discharge with Tube-Like Electron Beam
- V. M. Atamanov, G. B. Levadny, +6 authors N. Timchenko
- Materials Science
- 1982
The efficiency of energy dissipation caused by the mechanism of turbulent plasma heating from a tube-like electron beam in a electronegative gas is measured calorimetrically. Amorphous Si-layers are… Expand
PULSED HIGH-$beta$ TOKAMAK-LIKE SYSTEM WITH RECTANGULAR CHAMBER CROSS SECTION.
- V. M. Atamanov, G. B. Levadnyi, Y. Nasedkin, N. I. Shchedrin
- Physics
- 1972
Dissociation of CO/sub 2/ in the nonequilibrium plasma of a steady-state beam--plasma discharge
- V. M. Atamanov, I. Zhuzhunashvili, G. B. Levadnyi, Y. Nasedkin, V. A. Nikiforov, N. Timchenko
- Chemistry
- 1 May 1979
The dissocation of carbon dioxide in a steady-state beam--plasma discharge has been studied. The experiments show that the degree of conversion is 0.75--1. The efficiency of the energy pumped into… Expand
Plasma‐Beam Discharge with a Pipe‐like Electron Beam as the Generator of Large Flows of Active Radicals
- V. M. Atamanov, G. B. Levadny, +4 authors N. Timchenko
- Materials Science
- 1982
Investigations on the device with a tube-like electron beam have been carried out. The behaviour of the plasma-beam discharge in active molecular gases at low pressures and at the pressure P = 1 Torr… Expand