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Experiments on beam--plasma discharges in connection with plasma chemistry
The properties of low-temperature plasmas are finding extensive use for chemical reactions. Efficient plasma-chemistry reactions require a steady-state plasma with a degree of ionization ..capExpand
Deposition and Etching of Thin Films by Means of Beam Plasma Discharge with Tube-Like Electron Beam
The efficiency of energy dissipation caused by the mechanism of turbulent plasma heating from a tube-like electron beam in a electronegative gas is measured calorimetrically. Amorphous Si-layers areExpand
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Dissociation of CO/sub 2/ in the nonequilibrium plasma of a steady-state beam--plasma discharge
The dissocation of carbon dioxide in a steady-state beam--plasma discharge has been studied. The experiments show that the degree of conversion is 0.75--1. The efficiency of the energy pumped intoExpand
Plasma‐Beam Discharge with a Pipe‐like Electron Beam as the Generator of Large Flows of Active Radicals
Investigations on the device with a tube-like electron beam have been carried out. The behaviour of the plasma-beam discharge in active molecular gases at low pressures and at the pressure P = 1 TorrExpand
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