V T -Airoldi

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We utilized a microwave plasma reactor based on a surface-wave-sustained discharge for uniform coating of fused silica windows with polycrystalline diamond films. Grain size and average roughness as small as 30 and 2.2 nm, respectively, were obtained, resulting in a uniform loss of transparency of only 10% over the 190-800-nm band for as-deposited(More)
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