Véronique Bardinal

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We present a quantitative study on the fabrication of microlenses using a low-cost polymer dispending technique. Our method is based on the use of a silicon micro-cantilever robotized spotter system. We first give a detailed description of the technique. In a second part, the fabricated microlenses are fully characterized by means of SEM (Scanning Electron(More)
In this paper, we discuss the design, fabrication, and characterization of electro-thermally-actuated polymer-based micro-optical electro-mechanical microsystems (MOEMS) for active microoptics in VCSEL devices. We describe in particular the principle of a SU8-based MOEMS designed for single-mode VCSEL beam active focusing. The ultimate objective is the(More)
Near infra-red (NIR) self-guided photo-polymerization is investigated in the context of micro-optics photo-fabrication on VCSELs (Vertical-Cavity Surface Emitting Lasers). We present the optimized process we have developed to allow for a collective fabrication on III-V devices wafers under real-time optical monitoring. The influence of photo-chemical(More)
The growing interest for monitoring the quality of water has triggered the need of fast, portable and cheap detection systems. To answer this problematic, we developed a lab on a chip for herbicide detection based on micro algal photosynthesis. A blue organic light-emitting diode is used as the excitation source while the resulting algae luminescence is(More)
Optical feedback interferometry (OFI) performance for microscale-flow sensing is studied theoretically and experimentally. A new numerical modeling approach for OFI flow meter spectrum reproduction is presented in this work to study the optical effect on the signal due to the micro-scale channel geometry. Two well-defined frequency peaks are found in the(More)
We report on the design and fabrication of polymer microlenses fabricated on patterned SU-8 layers in view of integrating microlenses on VCSEL arrays for laser beam shaping. For a standard top-emitting VCSEL, the lens has to be fabricated on a thick intermediate layer (pedestal) whose optimal thickness can be modelled as a function of the initial and of the(More)
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