Sorry, we do not have enough data to show an influence graph for this author.
- Full text PDF available (0)
Journals and Conferences
This paper reports on routine SIMS applications in SiGe EPI and on Oxynitride process control including the quality control of the SIMS data itself. As an example an advanced SIMS protocol will be discussed for nm-thin high-k layer metrology. This protocol is based on low energy oxygen beam analysis, which provides improved quantification of the N… (More)