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A new milling technique based on a focused ion beam (FIB) microsampling system is proposed to avoid the curtaining effect, commonly occurring in other FIB milling methods, in order to obtain a crosssectional device specimen with uniform thickness can be obtained for electron holographic observation.
A carbon coil was evaluated for use as a micro-solenoid in a small magnetic device. A single carbon coil was lifted out of the aggregate using a tungsten fine probe in a focused ion beam (FIB) system and was wired to two small electrodes in the specimen holder of a transmission electron microscope (TEM). A direct current was supplied to the single carbon… (More)
A new method for forming an electron hologram without Fresnel fringes caused by an electron biprism is presented. Adding a fine filament to the ordinary setup for off-axis electron holography directly prevented Fresnel diffraction at the electron biprism and eliminated 70% of the phase error due to the Fresnel diffraction. This made it possible to obtain a… (More)
We have developed a focused ion beam (FIB)-Ar ion-milling technique for high-resolution transmission electron microscopy. A micrometresized specimen was mounted on a cross section of metal foil of a few micrometres thick, using FIB microsampling. Following this, a 2 degrees wedgeshaped part was made in the specimen using FIB. Finally, the specimen was… (More)
The ultrahigh piezoelectricity of lead magnesium niobate-lead titanate (PMN-PT) single crystals is utilized for medical imaging and ultrasonic devices. It has been revealed that the domain structure is miniaturized down to the nanometer scale, indicating that the domain structure and its response to electric fields could play more roles. In this Letter, we… (More)
Phase-shifting electron holography and Lorentz microscopy were used to map dopant distributions in GaAs compound semiconductors with step-like dopant concentration. Transmission electron microscope specimens were prepared using a triple beam focused ion beam (FIB) system, which combines a Ga ion beam, a scanning electron microscope, and an Ar ion beam to… (More)
We report the development of technologically important nickel (Ni) nanodots (nanoparticles) dispersed in amorphous silica (SiO2) for high-temperature permselectivity for hydrogen separation membranes, crucial in hydrocarbon reactions and H(2) production, and present the systematic reconstruction of the three-dimensional (3D) structures of the nanodots using… (More)