We report a multi-physics simulation and layout design technique for integrated-MEMS (microelectromechanical systems) based on an electrical circuit simulator. A solver for the mechanical equation of motion has been programmed in a Verilog-A compatible HDL (hardware description language) within the Cadence Virtuoso environment to attain new designing… (More)
We introduce “Wafer Shuttle” that is suitable for integration of diverse functionalities. CMOS/MEMS design flow and environment based on SPICE is discussed. It is pointed out that modeling will be important to promote the R&D of MEMS/CMOS and/or diverse-functionalities integration on CMOS.