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— Nonlinear effects in single-crystal silicon microres-onators are analyzed with the focus on mechanical nonlinearities. The bulk acoustic wave (BAW) resonators are shown to have orders-of-magnitude higher energy storage capability than flex-ural beam resonators. The bifurcation point for the silicon BAW resonators is measured and the maximum vibration(More)
A method for sintering nanoparticles by applying voltage is presented. This electrical sintering method is demonstrated using silver nanoparticle structures ink-jet-printed onto temperature-sensitive photopaper. The conductivity of the printed nanoparticle layer increases by more than five orders of magnitude during the sintering process, with the final(More)
Phase noise in capacitively coupled microresonator-based oscillators is investigated. A detailed analysis of noise mixing mechanisms in the resonator is presented, and the capacitive transduction is shown to be the dominant mechanism for low-frequency 1/f-noise mixing into the carrier sidebands. Thus, the capacitively coupled micromechanical resonators are(More)
—A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (= 130 000) and high maximum drive level (= 0.12 mW at the hysteresis limit) is demonstrated. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching of a silicon-on-insu-lator wafer. A demonstration oscillator based on the new(More)
  • T Mattila
  • 1987
Different dilutions of chlorhexidine gluconate were tested by the Kelsey-Sykes procedure. The method was further modified on microtitration plates using 2,3,5-triphenyltetrazolium chloride (TTC) reduction as an indicator of bacterial growth. There was a good correlation with the results based on TTC reduction and the conventional method based on turbidity(More)
Three electrostatic transduction methods are analyzed for a micromechanical, longitudinal mode, beam resonator. The conventional parallel plate transducer placed at the location of maximum displacement is compared to two solid, dielectric transducers internal to the resonator. Although the solid dielectric offers higher permittivity than the(More)
Contactless rapid electrical sintering (RES) is demonstrated using microwave power. The method is implemented by coupling the near-field electric field of a sintering head across an underlying nanoparticle layer. We provide appropriate biasing conditions required for controlled power delivery and demonstrate real-time monitoring of the process by measuring(More)
This paper presents a passive wireless resonating sensor that is based on a ferroelectric varactor. The sensor replies with its data at an intermodulation frequency when a reader device illuminates it at 2 closely located frequencies. The paper derives a theoretical equation for the response of such a sensor, verifies the theory by simulations, and(More)
Room temperature substrate-facilitated sintering of nanoparticles is demonstrated using commercially available silver nanoparticle ink and inkjet printing substrates. The sintering mechanism is based on the chemical removal of the nanoparticle stabilizing ligand and is shown to provide conductivity above one-fourth that of bulk silver. A novel approach to(More)