Tokuji Yokomatsu

We don’t have enough information about this author to calculate their statistics. If you think this is an error let us know.
Learn More
In this paper, fabrication method of acceleration sensor with low parasitic capacitance is descried. By using Silicon on Honeycomb Insulator (SOHI) wafer as a base material instead of Silicon on insulator (SOI) wafer, parasitic capacitance has reduced to 20%. The sensitivity of the acceleration sensor measured from differential capacitance change revealed(More)
To realize extremely low-power consuming sensor systems, a SOHI (Silicon on Honeycomb Insulator) wafer, which has ultra-small parasitic capacitance, is proposed and an accelerometer is fabricated to demonstrate use of the technique. In case of using a low-power-consumption switched capacitor measurement circuit, parasitic capacitance decreases sensor(More)
  • 1