Tobias Vancura

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A monolithic integrated tactile sensor array is presented, which is used to perform non-invasive blood pressure monitoring of a patient. The advantage of this device compared to a hand cuff based approach is the capability of recording continuous blood pressure data. The capacitive, membrane-based sensor device is fabricated in an industrial CMOS-technology(More)
Vertical Hall sensors have been fabricated using a new process combining deep-RIE silicon trench etching and anisotropic TMAH silicon wet etching to precisely define the sensor's active area. The demonstrated release of the bottom of the devices with a wet etching step results in a well-defined and uniformly doped active area. The trench-defined vertical(More)
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