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The rigorous coupled wave analysis (RCWA) is a widely used method for simulating diffraction from periodic structures. Since its recognized formulation by Moharam [J. Opt. Soc. Am. A12, 1068 and 1077 (1995)], there still has been a discussion about convergence problems. Those problems are more or less solved for the diffraction from line gratings, but there(More)
— To meet fast changing demands on modern software architectures the ambition to shorten and improve software development processes has increased. The approach of model-driven software development focuses models as specification of software and on transformations of those models to finally get source code. The advantage of the model-driven approach still(More)
In order to increase efficiency, enterprises support their business processes by information technology (IT). The majority of business processes requires human interaction. Human interaction results in a growing complexity of the supporting IT. Model-driven approaches to software development are a promising solution to be able to cope with this complexity.(More)
Early formulations of the RCWA yield, implicated by the erroneous application of factorization rules to discrete Fourier transformations, poor convergence in certain cases. An explanation for this finding and an approach to overcome the problem for crossed gratings was first given by Li [J. Opt. Soc. Am. A 13, 1870 (1996) and 14, 2758 (1997)]. A further(More)
The approximate inverse is a scheme to obtain stable numerical inversion formull for linear operator equations of the rst kind. Yet, in some applications the computation of a crucial ingredient, the reconstruction kernel, is time-consuming and instable. It may even happen that the kernel does not exist for a particular semi-discrete system. To cure this(More)