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Barium Strontium Titanate (BST) materials, both in target (bulk) and thin film (6OOA-12OOA) form, were characterized using x-ray diffraction (XRD). Film structure as a function of composition, processing parameters and underlying substrate was determined. Differences in the lattice parameter between bulk and sputtered film form were observed, with the(More)
Metal thin film resistors have been integrated into a damascene-copper multilayer metallization system for mixed-signal BiCMOS technology platforms. The thin film process can be adjusted to achieve resistors with very low temperature coefficients, high linearity, low noise, and improved matching as compared to resistors based on implanted silicon or(More)
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