Theodora Ivanova

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The focus of the paper is on the comparison of results obtained using and not using group screening in an experimental design methodology applied to a semiconductor manufacturing simulation model. A whole-line simulation model of a semiconductor fab is built. The model includes more than 200 tools used in manufacturing 2 products with around 250 steps each.(More)
The focus of the paper is on the comparison of results obtained using and not using group screening in an experimental design methodology applied to a semiconductor manufacturing simulation model. A whole-line simulation model of a semiconductor fab is built. The model includes more than 200 tools used in manufacturing 2 products with around 250 steps each.(More)
The focus of the paper is on the application of an experimental design methodology to a semi-conductor manufacturing simulation model. A complex whole line simulation model of a semiconductor fab is built. Seventeen input factors are set for investigation through a 2-stage group-screening experimental design. A multiple response regression metamodel is(More)
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