Theodora Ivanova

Learn More
The focus of the paper is on the comparison of results obtained using and not using group screening in an experimental design methodology applied to a semiconductor manufacturing simulation model. A whole-line simulation model of a semiconductor fab is built. The model includes more than 200 tools used in manufacturing 2 products with around 250 steps each.(More)
The focus of the paper is on the application of an experimental design methodology to a semi-conductor manufacturing simulation model. A complex whole line simulation model of a semiconductor fab is built. Seventeen input factors are set for investigation through a 2-stage group-screening experimental design. A multiple response regression metamodel is(More)
  • 1