Tetsuji Kodama

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We propose a reconstruction method of surface morphology using a combination of secondary and back-scattered electron signals from the scanning electron microscope (SEM). Compared with multiple-detector methods, the proposed system requires only conventional secondary and backscattered electron detectors for a line profile reconstruction in one direction.(More)
In this paper, a fuzzy modeling method using genetic algorithms (GAs) with a conciseness measure is presented. This paper introduces De Luca and Termini's fuzzy entropy to evaluate the shape of a membership function, and proposes another measure to evaluate the deviation of a membership function from symmetry. A combined measure is then derived from these(More)
It is demonstrated that power-laws which are modified by logarithmic corrections arise in supercorrelated systems. Their characteristic feature is the energy attributed to a state (or value of a general cost function) which depends nonlinearly on the phase space distribution of the constituents. A onedimensional dissipative deterministic model is introduced(More)
A reconstruction method of surface morphology with genetic algorithms from a line scan in the scanning electron microscope (SEM) has been developed. This method is an application of genetic algorithms, which are search algorithms based on the mechanics of natural selection and genetics, to surface morphology in SEM. To reconstruct the microstructures of a(More)
A novel technique for reconstructing the phase shifts of electron waves was applied to Cs-corrected scanning transmission electron microscopy (STEM). To realize this method, a new STEM system equipped with an annular aperture, annularly arrayed detectors and an arrayed image processor has been developed and evaluated in experiments. We show a reconstructed(More)