Tetsuji Kodama

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We propose a reconstruction method of surface morphology using a combination of secondary and back-scattered electron signals from the scanning electron microscope (SEM). Compared with multiple-detector methods, the proposed system requires only conventional secondary and backscattered electron detectors for a line profile reconstruction in one direction.(More)
In this paper, a fuzzy modeling method using genetic algorithms (GAs) with a conciseness measure is presented. This paper introduces De Luca and Termini's fuzzy entropy to evaluate the shape of a membership function, and proposes another measure to evaluate the deviation of a membership function from symmetry. A combined measure is then derived from these(More)
It is demonstrated that power-laws which are modified by logarithmic corrections arise in supercorrelated systems. Their characteristic feature is the energy attributed to a state (or value of a general cost function) which depends nonlinearly on the phase space distribution of the constituents. A onedimensional dissipative deterministic model is introduced(More)
A novel technique for reconstructing the phase shifts of electron waves was applied to Cs-corrected scanning transmission electron microscopy (STEM). To realize this method, a new STEM system equipped with an annular aperture, annularly arrayed detectors and an arrayed image processor has been developed and evaluated in experiments. We show a reconstructed(More)
A genetic algorithm has been applied to the line profile reconstruction from the signals of the standard secondary electron (SE) and/or backscattered electron detectors in a scanning electron microscope. This method solves the topographical surface reconstruction problem as one of combinatorial optimization. To extend this optimization approach for(More)
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