Tetsuhiro Sumimoto

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CONVENTIONAL SURFACE INSPECTION We have developed a new apparatus to cope W I T H LASER BEAM. with the surface inspection of products having even undulating or stepped surfaces. To realize such surface inspection, we combined the three dimensi~nal shape measurement through laser beam scanning and the flaw and defwct identification t h m u g h diffraction(More)
A B S T R A C T This paper describes the accurate shape inspection method of 3-D objects. To make measurement more precisely, we introduce a newly developed composite image sensor system. The image u n i t of the proposed system has two different type image sensors, area and line types. i t is so dcsigncd that i t s pixel composition is overlapped(More)
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