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Journals and Conferences
We show that hydrogen-terminated (111) Si wafers prepared with NH(4)F-based treatments can serve as a calibration standard for ellipsometers and reflectometers.
The ordinary and extraordinary complex refractive indices, n(o) - j kappa(o) and n(e) - j kappa(e), of a nematic liquid crystal were measured in the infrared region at 3.0-11.5-microm wavelength. The complex refractive indices were evaluated in terms of the angular dependence of the reflectance. Semicylindrical CsI prisms and a goniometer were used for… (More)
Hafnium silicate films were successfully prepared by VALID using TEOS as the Si source. They show well behaved C-V characteristics, and their leakage current density was analysed.