Tatjana Woit

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High vertical resolution 3D Nanoimprint technology for nanophotonic applications is presented. Opaque and transparent 3D templates with 64 different heights are fabricated. Surface roughness and structure height accuracy better than 1nm are achieved. The conservation of these critical parameters during the 3D Nanoimprint process is proved. A(More)
Microspectrometers are very important and reveal a high potential for networked sensing systems. They are widely implemented in both industrial and scientific applications. A novel Fabry-Pérot-based nanospectrometer with nanoimprinted cavities has been designed. The key parts of the nanospectrometer are Fabry-Pérot filter arrays with different(More)
Nowadays, nanosensor arrays have a great potential in industrial process control, automatic identification or medical applications. Regarding the medical field, the possibility to detect characteristic biomarkers or environmental toxins in living spaces in a transcutaneous, non-invasive and user-friendly way will open new markets. Furthermore, by(More)
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