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The InGaN/GaN multiple quantum well structures on sapphire substrates were observed by scanning electron microscope (SEM) using obliquely polished samples. From the contrast change across the p-n junction, piezoelectric fields were deduced. The direction of the piezoelectric field was consistent with the theoretical prediction, but the strength was smaller.… (More)
Mapping of the potential distribution using a scanning electron microscope (SEM) has been reported in recent years [1,2] for semiconductors such as Si, GaAs and InP. But, there are no such studies on GaN-based devices, to our knowledge. In this study, we observed two types of GaN-based devices by SEM to see if there is a condition that the contrast matches… (More)