Taha M Ben Masaud

We don’t have enough information about this author to calculate their statistics. If you think this is an error let us know.
Learn More
We fabricated and measured the optical loss of polysilicon waveguides deposited using hot-wire chemical vapor deposition at a temperature of 240°C. A polysilicon film 220 nm thick was deposited on top of a 2000 nm thick plasma-enhanced chemical vapor deposition silicon dioxide layer. The crystalline volume fraction of the polysilicon film was measured by(More)
  • 1