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Journals and Conferences
A high voltage enhancement-type thin film transistor (TFT) has been fabricated on quartz in layers of laser-recrystallized polysilicon. The fabrication details and TFT characteristics are described.
Metal-gate thin-film transistors (TFT's) have been fabricated in layers of laser-recrystallized polycrystalline silicon on fused quartz substrates at processing temperatures below 625°C. Tantalum… (More)
High energy ion implantation with a Van-de-Graaff accelerator has been successfully applied to fabricate integrated bipolar devices. High energy As+and B+ions are implanted in p type substrate… (More)