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Hydrogen plasma treatment of silicon thin-film structures and nanostructured layers

• A. N. Nazarov, V. S. Lysenko, T. M. Nazarova
• 2008

The review concentrates on the analysis of the RF hydrogen plasma effect on thin-film metal-dioxide-silicon and silicon-dioxide silicon structures which are a modern basis of microand… (More)

Hydrogen plasma modification of shallow implanted Germanium layers

• A. N. Nazarov, V. O. Yukhymchuk, +6 authors Ryan Duffy
• 2016 International Conference on Nanomaterials…
• 2016

RF hydrogen plasma treatment, rapid thermal annealing and thermal annealing of high-dose implanted amorphized p-type Ge layers have been studied by Raman scattering spectroscopy, AFM, SIMS and… (More)

Carbon-rich nanostructured a-SiC for cold emitters

• S. A. Gordienko, A. N. Nazarov, +7 authors T. M. Nazarova
• 2013 IEEE XXXIII International Scientific…
• 2013

This work describes emission properties of a new nanostructured material which is carbon-rich amorphous (a) SiC deposited on silicon wafer. Even non-optimized technology demonstrates that the field… (More)

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