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An SOI based hyperbolic paraboloid geometry capacitive micromachined ultrasonic transducer (CMUT) array has been fabricated to realize a frequency independent constant beamwidth broadband beamforming capability. Detailed fabrication and packaging techniques are presented. A Polytec laser Doppler vibrometer has been used to measure the transient and(More)
Capacitance measurement results for an SOI based CMUT are presented. Measurement results show that the variation in capacitance change as a function of both DC bias and AC excitation is considerably higher than analytically calculated values. Investigation shows that this deviation in capacitance from analytically calculated values is due to the combined(More)
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