T. N. Tanskaya

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The bulk acoustic wave resonator with the acoustic Bragg reflector is considered. The materials for the Bragg reflector layers are chosen. These materials are molybdenum for the high-impedance acoustic layers and aluminum for the low-impedance ones. The surface roughness of the molybdenum and aluminum thin-film layers are investigated. The influence of the(More)
The characteristics of the thin-film resonator with the piezoelectric transducer based on zinc oxide and acoustic Bragg reflector based on 5 pairs of layers of molybdenum and aluminum were investigated. The parameters of the equivalent electrical circuit of the resonator were found. The dependencies of the equivalent electrical parameters of the resonator(More)
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