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Photographic plates used in electron microscopy must have a high resolving power. The resolving power of photographic plates is usually expressed by the maximum number of resolved lines in 1 mm. This method of expressing resolving power is not always adequate for electron microscopy, particularly when the resolution of small spots is treated. The present(More)
We investigated the carrot-defect reduction effect by optimizing the buffer layers of 4H-Silion Carbide(SiC) epitaxial wafers. The SiC epitaxial wafer with the 0.5 &#x03BC;m-thick optimized buffer layer show the carrot-defect density of 0.13 cm<sup>&#x2212;2</sup>, since that with the conventional buffer layer were 0.68 cm<sup>&#x2212;2</sup>. Although the(More)
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