T. M. H. Lee

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In this work, antiwear nanoimprint templates were made by depositing and patterning diamondlike carbon ͑DLC͒ films on Si and quartz. A capacitively coupled plasma enhanced chemical vapor deposition ͑PECVD͒ system was configured to deposit 100 nm– 1 ␮m thick DLC films on Si and quartz substrates. These films were characterized with Raman spectroscopy,(More)
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