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This paper reviews the status of the process development and up-scaling of thin-film solar cells and modules based on amorphous (a-Si:H) and microcrystalline (/spl mu/c-Si:H) silicon at the Institute of Photovoltaics (IPV) on substrate areas up to 30/spl times/30 cm/sup 2/. Initial efficiencies of 10.6% and 10.7% were achieved for a-Si:H//spl mu/c-Si:H(More)
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