Suping Chang

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A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented in conventional monochromatic interferometers is not present in the contact and non-contact measurement, and(More)
Aspheric optical components are the indispensable part of modern optics systems. With the constant development of aspheric optical fabrication technique, the systems with large aperture convex aspheric optical components are widely used in astronomy and space optics. Thus, the measurement of the figure error of the whole convex aspherical surface with high(More)
A novel atomic force microscope (AFM) head based on white light interference (WLI) is developed for nanoscale surface measurement. In this head, instead of an optical beam deflection (OBD) technique for AFM probe position, WLI fringes on the surface of the probe cantilever are analyzed for probe position. The probe adjustment mechanism is designed, an(More)
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