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A numerical approach for eigenvalue analysis of electrostatically tunable micro-mechanical actuators is proposed. An efficient algorithm for calculating the natural frequwncy shifting due to applied DC turning voltage is proposed. In the calculation of the coupled field problem, 3-D FEM and BEM are employed. The numerical examples are presented and the(More)
First, the Thomas-Fermi-Amaldi (TFA) equation was formulated with a newly derived condition to remove the singularities at the nuclei, which coincided with the molecular cusp condition. Next, the collocation method was applied to the TFA equation using the grid-based density functional theory. In this paper, the electron densities and the radial(More)
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