Sun-Sik Song

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Nanosphere lithography is proposed as a new technique for the fabrication of nanoscale pillars on p-GaN layer. This technique is an easy and simple process using a self-assembled monolayer of spheres, which act as etching masks to form pillars on a Si3N4 substrate, that could be utilized as a stamp for UV-based imprint lithography. We can apply the UV-based(More)
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