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Continual scaling of on-chip wiring structures has brought significant challenges for materials and processes beyond the 32-nm technology node in microelectronics. Recently, 3-D integration with through-silicon vias (TSVs) has emerged as an effective solution to meet the future interconnect requirement. Among others, thermomechanical reliability is a key(More)
In this work, we propose an efficient and accurate full-chip thermo-mechanical stress and reliability analysis framework. To the best of our knowledge this is the first such system which enables full-chip stress simulation as compared to existing commercial Finite Element Analysis (FEA) tools which can only simulate very small cross-sections at a time. Our(More)
This paper investigates two key aspects of thermomechanical reliability of through-silicon vias (TSV) in 3D interconnects. One is the piezoresistivity effect induced by the near surface stresses on the charge mobility for pand nchannel MOSFET devices. The other problem concerns the interfacial delamination induced by thermal stresses including the pop-up(More)
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Three-dimensional (3-D) integration with throughsilicon vias (TSVs) has emerged as an effective solution to overcome the wiring limit imposed on device density and performance. However, thermal stresses induced in the TSV structures can affect the device performance by degrading carrier mobility and raise serious reliability concerns. In this paper, the(More)
In 3-D interconnect structures, process-induced thermal stresses around through silicon vias (TSVs) raise serious reliability issues such as silicon cracking and performance degradation of devices. In this study, the thermo-mechanical reliability of 3-D interconnect was investigated using finite element analysis (FEA) combined with analytical methods. The(More)
Three-dimensional (3-D) integration with through-silicon-vias (TSVs) has emerged as an effective approach to overcome the wiring limit beyond the 32 nm technology node. Due to the mismatch of thermal expansion between the via material and Si, thermal stresses ubiquitously exist in the integrated 3-D structures. The thermal stresses can be significant to(More)
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Continuous scaling of on-chip wiring structures has brought significant challenges for materials and processes beyond the 32 nm technology node in microelectronics. Recently threedimensional (3-D) integration with through-silicon-vias (TSVs) has emerged as an effective solution to meet the future interconnect requirement. Thermo-mechanical reliability is a(More)
An analytical approach to predict initiation and growth of interfacial delamination in the through-silicon via structure is developed by combining a cohesive zone model with a shear-lag model. Two critical temperatures are predicted for damage initiation and fracture initiation, respectively. It is found that via extrusion significantly increases beyond the(More)