Su Jong Yoon

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Indium tin oxide (ITO) films with various thicknesses from 104 nm to 513 nm were prepared onto polyethylene terephthalate (PET) substrates by using r.f. magnetron sputtering without intentionally heating the substrates. The structural, optical, and electrical properties of ITO films were investigated as a function of film thickness. It was found that the(More)
Aluminum-doped zinc oxide (AZO) thin lms, a most promising transparent conducting oxide (TCO) material, were deposited on exible and transparent polyethersulphone (PES) substrates by using an RF magnetron sputtering method. The lms were well grown predominantly vertically to substrates with c-axis orientations, as on other rigid substrates. The substrate(More)
The microstructure and characteristics of silicon-incorporated diamond-like carbon film, fabricated using a radio-frequency plasma-enhanced chemical vapor deposition process with hexamethyldisilane [(CH3)3,Si x Si(CH3)3:HMDS] gas as a silicon source, were investigated. Diamond-like carbon films with silicon compositions from 0 to 5 atomic percent were(More)
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