Stoyan Nihtianov

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In precision mechatronic systems, such as wafer steppers, the position of critical mechanical components must be dynamically stabilized with sub-nanometer precision. This can be achieved by a servo loop consisting of a displacement sensor and an actuator. Compared to optical interferometers, capacitive displacement sensors offer smaller size and lower cost.(More)
—In this paper, we propose a novel interface concept for eddy current displacement sensors. A measurement method and a new front-end circuit are also proposed. The front-end circuit demonstrates excellent thermal stability, high resolution, and low-power consumption. The proposed idea is analytically investigated. The demodulation principle, as well as the(More)