Steven K. Dew

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This paper presents a novel 3D thermal simulation tool for semiconductor integrated devices. The simulator is used to automatically generate an accurate 3D physical model of the device to be simulated from layout information. The simulator produces an appropriate mesh of the device based on a rectangular block structure. The mesh is automatically created(More)
The temperature cycling effect on electromigration behavior under pulsed current conditions for metallization used in very large scale integrated (VLSI) devices is numerically investigated. This involves the solution of a two-dimensional (2-D) heat-conduction equation and a one-dimensional (1-D) diffusiondrift equation. We find that the characteristic(More)
Resonant glassy nanostrings have been employed for the detection of biomolecules. These devices offer high sensitivity and amenability to large array integration and multiplexed assays. Such a concept has however been impaired by the lack of stable and biocompatible linker chemistries. Diazonium salt reduction-induced aryl grafting is an aqueous-based(More)
Fabrication and characterization of conjugate nano-biological systems interfacing metallic nanostructures on solid supports with immobilized biomolecules is reported. The entire sequence of relevant experimental steps is described, involving the fabrication of nanostructured substrates using electron beam lithography, immobilization of biomolecules on the(More)
Creation of self-organized surface nanostructures by ion beam sputtering (IBS) has strong potential for use in a broad range of technologies, from nanoelectronics and photonics to sensing and catalysis. Recently, we have developed a simple two-stage process for fabricating self-assembled arrays of Cu dots and lines on Si and SiO(2) substrates employing IBS(More)
A detailed process characterization of SML electron beam resist for high-aspect-ratio nanopatterning at high sensitivity is presented. SML contrast curves were generated for methyl isobutyl ketone (MIBK), MIBK/isopropyl alcohol (IPA) (1:3), IPA/water (7:3), n-amyl acetate, xylene, and xylene/methanol (3:1) developers. Using IPA/water developer, the(More)
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