Steve Hejl

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Stressors have been used since 90 nm technology to improve device performance to overcome the limitations of scaling. The stressors, including, - CPEN, TPEN, SMT, and e-SiGe to improve NMOS and PMOS drive current exhibit proximity dependence. In addition, unintentional stressors such as STI edge proximity introduce additional layout dependencies. Two(More)
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