Stephan Borel

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The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to allow reconfigurable RF functions such as filters, oscillators or antennas. This paper will focus on the MEMS(More)
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to allow reconfigurable RF functions such as filters, oscillators or antennas. This paper will focus on the MEMS(More)
In this paper, the authors presented an integration strategy for metal gate GAA transistors made by SON process using poly-gate replacement through contact hole (PRETCH). Double gate (DG) type MOSFETs, including planar DG gate-all-around and fin-FETs are today known as the best candidates for the ultimate sealing of the logic CMOS technologies on silicon.(More)
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