Stella W. Pang

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Cells are known to be surrounded by nanoscale topography in their natural extracellular environment. The cell behavior, including morphology, proliferation, and motility of bovine pulmonary artery smooth muscle cells (SMC) were studied on poly(methyl methacrylate) (PMMA) and poly(dimethylsiloxane) (PDMS) surfaces comprising nanopatterned gratings with 350(More)
Tissue engineering seeks to develop functional tissues in a biomimetic environment in vitro. As the extracellular environment in vivo is composed of numerous nanostructures, fabrication of nanostructured substrates will be valuable for tissue engineering applications. In this article, we report a simple nanoimprint lithography (NIL) process to pattern(More)
— A simple process has been developed which combines thick single-crystal Si micromechanical devices with a bipolar complimentary metal–oxide–semiconductor (BiCMOS) integrated circuit process. This merged process allows the integration of Si mechanical resonators as thick as 11 m with any integrated circuit process with the addition of only a single masking(More)
Single-molecule studies of the interactions of DNA and proteins are important in a variety of biological or biotechnology processes ranging from the protein's search for its DNA target site, DNA replication, transcription , or repair, and genome sequencing. A critical requirement for single-molecule studies is the stretching and immobilization of otherwise(More)
This paper discusses the development of a high-accuracy endpointing algorithm for the emitter etch of a heterojunction bipolar transistor HBT. Fabrication of high-performance HBT's using self-aligned base-emitter processes requires etching through the emitter layer and stopping with very high accuracy on the base layer. The lack of selectivity in dry(More)
The profile shape and the flow behavior of polymer nanoscale gratings made by a thermal nanoimprint process are precisely examined using visible light angular scatterometry. Nanoimprinted poly͑methyl methacrylate͒ ͑PMMA͒ lines with 60– 800 nm width, 100– 200 nm height, and varied residual thicknesses of 70– 400 nm have been investigated using this optical(More)
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