Steffen Leopold

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Nano-structure functional electrodes for high energy density MEMS supercapacitors have been fabricated by combining atomic layer deposition (ALD) and cyclic deep reactive ion etch (C-DRIE) in MEMS technology. The electrodes were structured with C-DRIE organized silicon grass (Si-g) as the scaffold for conformal coating with ALD nano-layer TiN as the current(More)
In this paper we present a technique for a controlled and instantaneous onset of silicon grass generation using optical emission spectroscopy of the plasma. The spectrum of the etching step in deep reactive ion etching (DRIE) is investigated in detail. Two specific wavelengths are identified, which significantly change intensity during passivation layer(More)
After marking, the axial point of the temporomandibular joint was arbitrarily determined with a teleradiographic cephalostat according to the Gerber, Ramfjord, Posselt, and Hobo procedure as well as the Whip-Mix-Quick-Mount external arch. The results were compared with the position of the true hinge axis. The distance which this axial point deviated from(More)
We present an anamorphotic imaging system with a separately tunable magnification in horizontal and vertical direction in order to change the aspect ratio of the image. The design is based on cylindrical membrane lenses made of aluminum nitride with tunable focal power to realize a vario system without moving elements. We demonstrate the design concept of(More)
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