Study for Phosphorus Contamination to High Voltage TransistorsLiang Li, Qiong Luo, +5 authors Chor Shu ChengIEEE Transactions on Semiconductor Manufacturing2016Threshold voltage (<inline-formula> <tex-math notation="LaTeX">$\text{V}_{\text{TH}}$ </tex-math></inline-formula>) needs to be well controlled to determine the switching point of the transistors.â€¦ (More)