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Multi-frequency wideband RF filters using high electromechanical coupling laterally vibrating lithium niobate MEMS resonators

• Songbin Gong, Gianluca Piazza
• IEEE 26th International Conference on Micro…
• 2013

This paper reports on the first implementation of monolithically integrated wideband RF filters using Lithium Niobate (LN) based high electromechanical coupling (kt2) MEMS resonators. MEMS-based RF… (More)

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